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ALD/CVD Precursors

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Ag
Abbreviation CAS No. Purity
Ag(fod)(PEt3) 165461-74-5 99.999
Ag(thd) 79827-25-1 99.99
Al
Abbreviation CAS No. Purity
TEA 97-93-8 99.9999
TMA 75-24-1 99.9999
As
Abbreviation CAS No. Purity
TBAs 4262-43-5 99.999
B
Abbreviation CAS No. Purity
TIPB 5419-55-6 99.9999
TEB(O) 150-46-9 99.9999
TMB(O) 121-43-7 99.9999
Be
Abbreviation CAS No. Purity
DEB 542-63-2 99.9999
Bi
Abbreviation CAS No. Purity
Bi(thd)3 142617-53-6 99.99
TMBi 593-91-9 99.9999
C
Abbreviation CAS No. Purity
592-41-6 99.9999
156-60-5 99.9999
4142-85-2 99.999
Ce
Abbreviation CAS No. Purity
Ce(thd)4 18960-54-8 99.999
Co
Abbreviation CAS No. Purity
CpCo(CO)2 12078-25-0 99.9999
CCTBA 56792-69-9 99.9999
Co(iPr-MeAMD)2 635680-58-9 99.99
CoCp2 1277-43-6 99.999
Cu
Abbreviation CAS No. Purity
Cu(hfac)2 14781-45-4 99.999
Er
Abbreviation CAS No. Purity
Er(thd)3 34750-80-6 99.999
Fe
Abbreviation CAS No. Purity
3TBOFe 620945-29-1 99.99
FeCp2 102-54-5 99.999
Ga
Abbreviation CAS No. Purity
TPGa 4452-61-3 99.999
TDMAG 57731-40-5 99.99
TEG 1115-99-7 99.9999
TMG 1445-79-0 99.9999
Gd
Abbreviation CAS No. Purity
Gd(TMSA)3 35789-03-8 99.999
Ge
Abbreviation CAS No. Purity
992-91-6 99.99
TDMAGe 7344-40-3 99.9999
Hf
Abbreviation CAS No. Purity
CpTDMAH 941596-80-1 99.9999
TEMAH 352535-01-4 99.9999
TDMAH 19782-68-4 99.9999
In
Abbreviation CAS No. Purity
TMI 3385-78-2 99.9999
InCp 34822-89-4 99.9999
Ir
Abbreviation CAS No. Purity
Ir(acac)3 15635-87-7 99.99
La
Abbreviation CAS No. Purity
La(iPr-MeAMD)3 635680-72-7 99.99
La(i-PrCp)3 68959-87-5 99.99
La(TMSA)3 175923-07-6 99.99
La(thd)3 14319-13-2 99.999
Li
Abbreviation CAS No. Purity
TBOLi 1907-33-1 99.99
Li(TMHD) 22441-13-0 99.99
Mg
Abbreviation CAS No. Purity
Mg(EtCp)2 114460-02-5 99.9995
Mg(MeCp)2 40672-08-0 99.9995
MgCp2 1284-72-6 99.9999
Mn
Abbreviation CAS No. Purity
Mn(EtCp)2 101923-26-6 99.999
MnCp2 73138-26-8 99.999
Mo
Abbreviation CAS No. Purity
BTBDMo 923956-62-1 99.9999
Mo(CO)6 13939-06-5 99.99
N
Abbreviation CAS No. Purity
75-64-9 99.999
107-15-3 99.999
TMDS 15933-59-2 99.9999
Nb
Abbreviation CAS No. Purity
PETONb 3236-82-6 99.999
PDMANb 19824-58-9 99.999
Nd
Abbreviation CAS No. Purity
Nd(thd)3 15492-47-4 99.999
Ni
Abbreviation CAS No. Purity
Ni(iPr-MeAMD)2 635680-62-5 99.99
NiCp2 1271-28-9 99.999
P
Abbreviation CAS No. Purity
TEPO 78-40-0 99.9999
TMPO 512-56-1 99.9999
TBP 2501-94-2 99.999
Pd
Abbreviation CAS No. Purity
Pd(hfac)2 64916-48-9 99.99
Pt
Abbreviation CAS No. Purity
Me3Pt(MeCp) 94442-22-5 99.99
Pt(acac)2 15170-57-7 99.999
Ru
Abbreviation CAS No. Purity
Ru(EtCp)2 32992-96-4 99.999
RuCp2 1287-13-4 99.99
Sb
Abbreviation CAS No. Purity
TDMASb 7289-92-1 99.9999
TESb 617-85-6 99.9999
TMSb 594-10-5 99.9999
Sc
Abbreviation CAS No. Purity
MeCpSc 155037-27-7 99.99
CpSc 1298-54-0 99.99
Si
Abbreviation CAS No. Purity
HCDS 13465-77-5 99.9999
TEOS 78-10-4 99.9999999
DIPAS(LTO-520) 908831-34-5 99.9999
BDEAS(SAM24) 27804-64-4 99.9999
TSA 13862-16-3 99.999
3DMAS 15112-89-7 99.9999
BTBAS 186598-40-3 99.9999
Sn
Abbreviation CAS No. Purity
SnCl4 7646-78-8 99.9999
TDMASn 1066-77-9 99.9999
Ta
Abbreviation CAS No. Purity
BTDMAT 69039-11-8 99.9999
BTEMAT 511292-99-2 99.9999
BTDEAT 169896-41-7 99.9999
PDMATa 19824-59-0 99.999
PETOTa 6074-84-6 99.999
Te
Abbreviation CAS No. Purity
DipTe 51112-72-2 99.99
DETe 627-54-3 99.9999
DTBT 83817-35-0 99.9999
Ti
Abbreviation CAS No. Purity
TiCl4 7550-45-0 99.9999
TIPT 546-68-9 99.9999
TEMAT 308103-54-0 99.9999
TDMAT 3275-24-9 99.9999
V
Abbreviation CAS No. Purity
TEMAV 791114-66-4 99.99
W
Abbreviation CAS No. Purity
BTBMW 406462-43-9 99.9999
W(CO)6 14040-11-0 99.9995
Y
Abbreviation CAS No. Purity
Y(MeCp)3 329735-72-0 99.995
Y(iPr-MeAMD)3 99.99
Y(thd)3 15632-39-0 99.999
Yb
Abbreviation CAS No. Purity
Yb(thd)3 15492-52-1 99.999
Zn
Abbreviation CAS No. Purity
DMZ 544-97-8 99.9999
DEZ 557-20-0 99.9999
Zr
Abbreviation CAS No. Purity
CpTDMAZ 33271-88-4 99.9999
TEMAZ 175923-04-3 99.9999
TDMAZ 19756-04-8 99.9999